发明授权
- 专利标题: Electromechanical transducer film and method for manufacturing electromechanical transducer film
- 专利标题(中): 机电换能器薄膜及制造机电换能器薄膜的方法
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申请号: US13004203申请日: 2011-01-11
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公开(公告)号: US08425026B2公开(公告)日: 2013-04-23
- 发明人: Osamu Machida , Yoshikazu Akiyama , Keiji Ueda , Akira Shimofuku
- 申请人: Osamu Machida , Yoshikazu Akiyama , Keiji Ueda , Akira Shimofuku
- 申请人地址: JP Tokyo
- 专利权人: Ricoh Company, Ltd.
- 当前专利权人: Ricoh Company, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: IPUSA, PLLC
- 优先权: JP2010-007431 20100115
- 主分类号: B41J2/04
- IPC分类号: B41J2/04 ; B41J2/17
摘要:
A method for manufacturing an electromechanical transducer film including a lower electrode and plural layers of a sol-gel solution film formed on the lower electrode by an inkjet method, the method including the steps of a) modifying a surface of the lower electrode, b) forming a first sol-gel solution film on the surface of the lower electrode by ejecting droplets of a sol-gel solution to the surface of the lower electrode, and c) forming a second sol-gel solution film on the first sol-gel solution film by ejecting droplets of the sol-gel solution to a surface of the first sol-gel solution film. Adjacent dots formed on the surface of the lower electrode by the droplets ejected in step b) overlap each other. Adjacent dots formed on the surface of the first sol-gel solution film by the droplets ejected in step c) do not overlap each other.
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