Invention Grant
- Patent Title: Methods of forming molybdenum sputtering targets
- Patent Title (中): 形成钼溅射靶的方法
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Application No.: US13340973Application Date: 2011-12-30
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Publication No.: US08425833B2Publication Date: 2013-04-23
- Inventor: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Peter R. Jepson , Prabhat Kumar , Steven A. Miller , Richard Wu , David G. Schwarz
- Applicant: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Peter R. Jepson , Prabhat Kumar , Steven A. Miller , Richard Wu , David G. Schwarz
- Applicant Address: US MA Newton
- Assignee: H.C. Starck Inc.
- Current Assignee: H.C. Starck Inc.
- Current Assignee Address: US MA Newton
- Agency: Bingham McCutchen LLP
- Main IPC: B22F3/12
- IPC: B22F3/12 ; B22F3/24 ; B22F3/20 ; C22C27/04
Abstract:
In various embodiments, tubular sputtering targets are produced by forming a tubular billet at least by pressing molybdenum powder in a mold and sintering the pressed molybdenum powder, working the tubular billet to form a worked billet, and heat treating the worked billet.
Public/Granted literature
- US20120189483A1 Methods of forming molybdenum sputtering targets Public/Granted day:2012-07-26
Information query
