发明授权
- 专利标题: Memory layout structure and memory structure
- 专利标题(中): 内存布局结构和内存结构
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申请号: US12874232申请日: 2010-09-02
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公开(公告)号: US08431933B2公开(公告)日: 2013-04-30
- 发明人: Tzung-Han Lee , Chung-Lin Huang , Hsien-Wen Liu
- 申请人: Tzung-Han Lee , Chung-Lin Huang , Hsien-Wen Liu
- 申请人地址: TW Hwa-Ya Technology Park Kueishan, Taoyuan
- 专利权人: Inotera Memories, Inc.
- 当前专利权人: Inotera Memories, Inc.
- 当前专利权人地址: TW Hwa-Ya Technology Park Kueishan, Taoyuan
- 代理商 Winston Hsu; Scott Margo
- 优先权: TW99123514A 20100716
- 主分类号: H01L29/10
- IPC分类号: H01L29/10
摘要:
A memory layout structure is disclosed, in which, a lengthwise direction of each active area and each row of active areas form an included angle not equal to zero and not equal to 90 degrees, bit lines and word lines cross over each other above the active areas, the bit lines are each disposed above a row of active areas, bit line contact plugs or node contact plugs may be each disposed entirely on an source/drain region, or partially on the source/drain region and partially extend downward along a sidewall (edge wall) of the substrate of the active area to carry out a sidewall contact. Self-aligned node contact plugs are each disposed between two adjacent bit lines and between two adjacent word lines.
公开/授权文献
- US20120012907A1 Memory layout structure and memory structure 公开/授权日:2012-01-19
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