Invention Grant
US08431955B2 Method and structure for balancing power and performance using fluorine and nitrogen doped substrates 有权
使用氟和氮掺杂衬底平衡功率和性能的方法和结构

Method and structure for balancing power and performance using fluorine and nitrogen doped substrates
Abstract:
Methods and systems evaluate an integrated circuit design for power consumption balance and performance balance, using a computerized device. Based on this process of evaluating the integrated circuit, the methods and systems can identify first sets of integrated circuit transistor structures within the integrated circuit design that need reduced power leakage and second sets of integrated circuit transistor structures that need higher performance to achieve the desired power consumption balance and performance balance. With this, the methods and systems alter the integrated circuit design to include implantation of a first dopant into a substrate before a gate insulator formation for the first sets of integrated circuit transistor structures; and alter the integrated circuit design to include implantation of a second dopant into the substrate before a gate insulator formation for the second sets of integrated circuit transistor structures. The method and system then output the altered integrated circuit design from the computerized device and/or manufactures the device according to the altered integrated circuit design.
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