发明授权
US08436414B2 Non-volatile semiconductor stacked memory device having two semiconductor pillars in a through hole and method for manufacturing same
有权
在通孔中具有两个半导体柱的非易失性半导体堆叠式存储器件及其制造方法
- 专利标题: Non-volatile semiconductor stacked memory device having two semiconductor pillars in a through hole and method for manufacturing same
- 专利标题(中): 在通孔中具有两个半导体柱的非易失性半导体堆叠式存储器件及其制造方法
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申请号: US12706127申请日: 2010-02-16
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公开(公告)号: US08436414B2公开(公告)日: 2013-05-07
- 发明人: Hiroyasu Tanaka , Hideaki Aochi , Ryota Katsumata , Masaru Kidoh , Masaru Kito , Yoshiaki Fukuzumi , Yosuke Komori , Megumi Ishiduki , Tomoko Fujiwara , Junya Matsunami , Ryouhei Kirisawa
- 申请人: Hiroyasu Tanaka , Hideaki Aochi , Ryota Katsumata , Masaru Kidoh , Masaru Kito , Yoshiaki Fukuzumi , Yosuke Komori , Megumi Ishiduki , Tomoko Fujiwara , Junya Matsunami , Ryouhei Kirisawa
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2009-033759 20090217
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
A nonvolatile semiconductor memory device includes: a semiconductor substrate; a stacked body provided on the semiconductor substrate, the stacked body having electrode films and insulating films being alternately stacked; a first and second semiconductor pillars; and a first and second charge storage layers. The first and second semiconductor pillars are provided inside a through hole penetrating through the stacked body in a stacking direction of the stacked body. The through hole has a cross section of an oblate circle, when cutting in a direction perpendicular to the stacking direction. The first and second semiconductor pillars face each other in a major axis direction of the first oblate circle. The first and second semiconductor pillars extend in the stacking direction. The first and second charge storage layers are provided between the electrode film and the first and second semiconductor pillars, respectively.
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