发明授权
US08436437B2 High performance MTJ elements for STT-RAM and method for making the same
有权
用于STT-RAM的高性能MTJ元件和制作相同的方法
- 专利标题: High performance MTJ elements for STT-RAM and method for making the same
- 专利标题(中): 用于STT-RAM的高性能MTJ元件和制作相同的方法
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申请号: US12803191申请日: 2010-06-21
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公开(公告)号: US08436437B2公开(公告)日: 2013-05-07
- 发明人: Cheng T. Horng , Ru-Ying Tong , Chyu-Jiuh Torng , Witold Kula
- 申请人: Cheng T. Horng , Ru-Ying Tong , Chyu-Jiuh Torng , Witold Kula
- 申请人地址: US CA Milpitas
- 专利权人: MagIC Technologies, Inc.
- 当前专利权人: MagIC Technologies, Inc.
- 当前专利权人地址: US CA Milpitas
- 代理机构: Saile Ackerman LLC
- 代理商 Stephen B. Ackerman
- 主分类号: H01L29/82
- IPC分类号: H01L29/82
摘要:
A STT-MTJ MRAM cell that utilizes transfer of spin angular momentum as a mechanism for changing the magnetic moment direction of a free layer includes an IrMn pinning layer, a SyAP pinned layer, a naturally oxidized, crystalline MgO tunneling barrier layer that is formed on an Ar-ion plasma smoothed surface of the pinned layer and a free layer that comprises an amorphous layer of Co60Fe20B20 of approximately 20 angstroms thickness or an amorphous ferromagnetic layer of Co40Fe40B20 of approximately 15 angstroms thickness formed between two crystalline layers of Fe of 3 and 6 angstroms thickness respectively. The free layer is characterized by a low Gilbert damping factor and by very strong polarizing action on conduction electrons. The resulting cell has a low critical current, a high dR/R and a plurality of such cells will exhibit a low variation of both resistance and pinned layer magnetization angular dispersion.
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