Invention Grant
- Patent Title: Hybrid system having a non-MEMS device and a MEMS device
- Patent Title (中): 具有非MEMS器件和MEMS器件的混合系统
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Application No.: US12927949Application Date: 2010-11-30
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Publication No.: US08436690B2Publication Date: 2013-05-07
- Inventor: Andrew D. McCraith , Richard S. Miller , Emmanuel P. Quevy
- Applicant: Andrew D. McCraith , Richard S. Miller , Emmanuel P. Quevy
- Applicant Address: US TX Austin
- Assignee: Silicon Laboratories Inc.
- Current Assignee: Silicon Laboratories Inc.
- Current Assignee Address: US TX Austin
- Agency: O'Keefe, Egan, Peterman & Enders LLP
- Main IPC: H03B5/30
- IPC: H03B5/30
Abstract:
A hybrid system having a non-MEMS device and a MEMS device is described. The apparatus includes a non-MEMS device and an integrated circuit including a MEMS device, the integrated circuit formed on a substrate. The integrated circuit includes a control circuit for the non-MEMS device and a MEMS control circuit for the MEMS device.
Public/Granted literature
- US20110095835A1 Hybrid system having a non-mems device and a mems device Public/Granted day:2011-04-28
Information query
