发明授权
- 专利标题: Detection apparatus
- 专利标题(中): 检测装置
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申请号: US12908405申请日: 2010-10-20
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公开(公告)号: US08437004B2公开(公告)日: 2013-05-07
- 发明人: Yuhei Sumiyoshi , Takumi Tokimitsu , Hiroyuki Yuuki
- 申请人: Yuhei Sumiyoshi , Takumi Tokimitsu , Hiroyuki Yuuki
- 申请人地址: JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2009-259310 20091112
- 主分类号: G01N21/55
- IPC分类号: G01N21/55 ; G01N21/88
摘要:
A detection apparatus which illuminates a sample and detects light reflected by the sample, comprises a light source, a columnar reflecting member having a columnar reflecting surface which reflects light having entered a first end of the columnar reflecting member by a plurality of number of times, and emits the light from a second end of the columnar reflecting member, a mirror which reflects light radiated by the light source so as to guide to the first end and a detector, wherein the sample is illuminated with the light emitted from the second end, and the detector is configured to detect the light which has been reflected by the sample and has passed through the columnar reflecting member, and a reflecting surface of the mirror is a concave surface, and a shape of a reflecting surface of the mirror on a section perpendicular to an axis of the columnar reflecting member is concave.
公开/授权文献
- US20110109908A1 DETECTION APPARATUS 公开/授权日:2011-05-12
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