发明授权
US08437173B2 Nonvolatile memory element, manufacturing method thereof, design support method therefor, and nonvolatile memory device 有权
非易失性存储元件,其制造方法,设计支持方法和非易失性存储器件

Nonvolatile memory element, manufacturing method thereof, design support method therefor, and nonvolatile memory device
摘要:
A nonvolatile memory element which can be initialized at low voltage includes a variable resistance layer (116) located between a lower electrode (105) and an upper electrode (107) and having a resistance value that reversibly changes based on electrical signals applied between these electrodes. The variable resistance layer (116) includes at least two layers: a first variable resistance layer (1161) including a first transition metal oxide (116b); and a second variable resistance layer (1162) including a second transition metal oxide (116a) and a third transition metal oxide (116c). The second transition metal oxide (116a) has an oxygen deficiency higher than either oxygen deficiency of the first transition metal oxide (116b) or the third transition metal oxide (116c), and the second transition metal oxide (116a) and the third transition metal oxide (116c) are in contact with the first variable resistance layer (1161).
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