Invention Grant
- Patent Title: Apparatus and method for deposition for organic thin films
- Patent Title (中): 用于有机薄膜沉积的装置和方法
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Application No.: US12467468Application Date: 2009-05-18
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Publication No.: US08440021B2Publication Date: 2013-05-14
- Inventor: Stephen R. Forrest , Fan Yang , Richard Lunt
- Applicant: Stephen R. Forrest , Fan Yang , Richard Lunt
- Applicant Address: US MI Ann Arbor
- Assignee: The Regents of the University of Michigan
- Current Assignee: The Regents of the University of Michigan
- Current Assignee Address: US MI Ann Arbor
- Agency: Kenyon & Kenyon LLP
- Main IPC: C23C16/00
- IPC: C23C16/00
Abstract:
The invention provides apparatus and methods for organic continuum vapor deposition of organic materials on large area substrates.
Public/Granted literature
- US20090280247A1 APPARATUS AND METHOD FOR DEPOSITION FOR ORGANIC THIN FILMS Public/Granted day:2009-11-12
Information query
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