- 专利标题: Nanowire photodetector and image sensor with internal gain
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申请号: US12528701申请日: 2008-02-26
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公开(公告)号: US08440997B2公开(公告)日: 2013-05-14
- 发明人: Deli Wang , Cesare Soci , Yu-Hwa Lo , Arthur Zhang , David Aplin , Lingquan Wang , Shadi Dayeh , Xin Yu Bao
- 申请人: Deli Wang , Cesare Soci , Yu-Hwa Lo , Arthur Zhang , David Aplin , Lingquan Wang , Shadi Dayeh , Xin Yu Bao
- 申请人地址: US CA Oakland
- 专利权人: The Regents of the University of California
- 当前专利权人: The Regents of the University of California
- 当前专利权人地址: US CA Oakland
- 代理机构: Greer, Burns & Crain Ltd.
- 国际申请: PCT/US2008/002529 WO 20080226
- 国际公布: WO2008/143727 WO 20081127
- 主分类号: H01L29/06
- IPC分类号: H01L29/06
摘要:
A 1D nanowire photodetector device includes a nanowire that is individually contacted by electrodes for applying a longitudinal electric field which drives the photocurrent. An intrinsic radial electric field to inhibits photo-carrier recombination, thus enhancing the photocurrent response. Circuits of 1D nanowire include groups of photodetectors addressed by their individual 1D nanowire electrode contacts. Placement of 1D nanostructures is accomplished with registration onto a substrate. A substrate is patterned with a material, e.g., photoresist, and trenches are formed in the patterning material at predetermined locations for the placement of 1D nanostructures. The 1D nanostructures are aligned in a liquid suspension, and then transferred into the trenches from the liquid suspension. Removal of the patterning material places the 1D nanostructures in predetermined, registered positions on the substrate.
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