发明授权
- 专利标题: Semiconductor device and method for manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US13378206申请日: 2011-02-27
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公开(公告)号: US08441045B2公开(公告)日: 2013-05-14
- 发明人: Huilong Zhu , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- 申请人: Huilong Zhu , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- 申请人地址: CN Beijing
- 专利权人: The Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人: The Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人地址: CN Beijing
- 代理机构: Morgan, Lewis & Bockius LLP
- 优先权: CN201010239273 20100727
- 国际申请: PCT/CN2011/071351 WO 20110227
- 国际公布: WO2012/013036 WO 20120202
- 主分类号: H01L27/085
- IPC分类号: H01L27/085 ; H01L29/84 ; H01L29/80 ; H01L31/112 ; H01L29/04
摘要:
The present application discloses a semiconductor device and a method of manufacturing the same. Wherein, the semiconductor device comprises: a semiconductor substrate; a stressor embedded in the semiconductor substrate; a channel region disposed on the stressor; a gate stack disposed on the channel region; a source/drain region disposed on two sides of the channel region and embedded in the semiconductor substrate; wherein, surfaces of the stressor comprise a top wall, a bottom wall, and side walls, the side walls comprising a first side wall and a second side wall, the first side wall connecting the top wall and the second side wall, the second side wall connecting the first side wall and the bottom wall, the angle between the first side wall and the second side wall being less than 180°, and the first sidewall and the second side wall being roughly symmetrical with respect to a plane parallel to the semiconductor substrate. Embodiments of the present invention are applicable to the stress engineering technology in the semiconductor device manufacturing.
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