Invention Grant
- Patent Title: Non-contact detection of surface fluid droplets
- Patent Title (中): 非接触式检测表面液滴
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Application No.: US12755090Application Date: 2010-04-06
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Publication No.: US08441268B2Publication Date: 2013-05-14
- Inventor: Peter Norton , Charley Abboud
- Applicant: Peter Norton , Charley Abboud
- Applicant Address: US CA Fremont
- Assignee: Lam Corporation
- Current Assignee: Lam Corporation
- Current Assignee Address: US CA Fremont
- Agency: Klintworth & Rozenblat IP LLC
- Main IPC: G01R27/26
- IPC: G01R27/26

Abstract:
A system for detecting fluid on a substrate is provided. The system includes, but is not limited to, a sensor board, a first capacitive sensor, and a platform upon which the substrate is to be placed. The first capacitive sensor is mounted on the sensor board. The first capacitive sensor has a transmit sensor pad for transmitting a signal, a receive sensor pad for receiving the signal, and an analog-to-digital convertor connected with the receive sensor pad for analyzing the received signal. The platform is a first distance from the transmit and receive sensor pads.
Public/Granted literature
- US20110241706A1 NON-CONTACT DETECTION OF SURFACE FLUID DROPLETS Public/Granted day:2011-10-06
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