发明授权
- 专利标题： Apparatus and method for batch non-contact material characterization
- 专利标题（中）： 批量非接触材料表征的装置和方法
-
申请号： US13495160申请日： 2012-06-13
-
公开(公告)号： US08441653B2公开(公告)日： 2013-05-14
- 发明人: Dong Seung Lee , Mikhail Belousov , Eric A. Armour , William E. Quinn
- 申请人： Dong Seung Lee , Mikhail Belousov , Eric A. Armour , William E. Quinn
- 申请人地址： US NY Plainview
- 专利权人： Veeco Instruments Inc.
- 当前专利权人： Veeco Instruments Inc.
- 当前专利权人地址： US NY Plainview
- 代理机构： Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- 主分类号： G01B11/24
- IPC分类号： G01B11/24
摘要：
An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.
公开/授权文献
信息查询
