Invention Grant
US08441773B2 Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
有权
电子元件,可变电容器,微动开关,微动开关的驱动方法和MEMS型电子元件
- Patent Title: Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
- Patent Title (中): 电子元件,可变电容器,微动开关,微动开关的驱动方法和MEMS型电子元件
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Application No.: US12412744Application Date: 2009-03-27
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Publication No.: US08441773B2Publication Date: 2013-05-14
- Inventor: Hiroshi Konishi , Junji Suzuki
- Applicant: Hiroshi Konishi , Junji Suzuki
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2006-262100 20060927; JP2007-147556 20070602
- Main IPC: H01G7/06
- IPC: H01G7/06 ; H01G5/16 ; H01G7/00

Abstract:
Driving is made possible in a moving range equivalent to or wider than the conventional range, with a driving voltage having a range smaller than a pull-in voltage. An electronic element includes a fixed portion provided with a first driving electrode and a first signal electrode, and a movable portion provided with a second driving electrode and a second signal electrode, movable with respect to the fixed portion and provided to generate a spring force to make restoration to a predetermined position. An electrostatic force is generated between the first and second driving electrodes by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.
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