发明授权
- 专利标题： Method of forming a MEMS power inductor
- 专利标题（中）： MEMS功率电感器的形成方法
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申请号： US13240728申请日： 2011-09-22
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公开(公告)号： US08443511B2公开(公告)日： 2013-05-21
- 发明人: Peter Smeys , Peter Johnson
- 申请人： Peter Smeys , Peter Johnson
- 申请人地址： US CA Santa Clara
- 专利权人： National Semiconductor Corporation
- 当前专利权人： National Semiconductor Corporation
- 当前专利权人地址： US CA Santa Clara
- 代理商 Eugene C. Conser; Wade J. Brady, III; Frederick J. Telecky, Jr.
- 主分类号： H01F7/06
- IPC分类号： H01F7/06
摘要：
A scalable MEMS inductor is formed on the top surface of a semiconductor die. The MEMS inductor includes a plurality of magnetic lower laminations, a circular trace that lies over and spaced apart from the magnetic lower laminations, and a plurality of upper laminations that lie over and spaced apart from the circular trace.
公开/授权文献
- US20120009689A1 Method of Forming a MEMS Power Inductor 公开/授权日：2012-01-12
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