发明授权
US08445881B2 Nonvolatile variable resistive element and nonvolatile semiconductor memory device
失效
非易失性可变电阻元件和非易失性半导体存储器件
- 专利标题: Nonvolatile variable resistive element and nonvolatile semiconductor memory device
- 专利标题(中): 非易失性可变电阻元件和非易失性半导体存储器件
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申请号: US13093171申请日: 2011-04-25
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公开(公告)号: US08445881B2公开(公告)日: 2013-05-21
- 发明人: Nobuyoshi Awaya , Yukio Tamai , Akihito Sawa
- 申请人: Nobuyoshi Awaya , Yukio Tamai , Akihito Sawa
- 申请人地址: JP Osaka JP Tokyo
- 专利权人: Sharp Kabushiki Kaisha,National Institute of Advanced Industrial Science and Technology
- 当前专利权人: Sharp Kabushiki Kaisha,National Institute of Advanced Industrial Science and Technology
- 当前专利权人地址: JP Osaka JP Tokyo
- 代理机构: Nixon & Vanderhye, P.C.
- 优先权: JP2010-099688 20110423
- 主分类号: H01L29/02
- IPC分类号: H01L29/02
摘要:
A large-capacity and inexpensive nonvolatile semiconductor memory device that prevents a leak current and is operated at high speed is implemented with a nonvolatile variable resistive element. A memory cell array includes the nonvolatile variable resistive elements each including a variable resistor composed of a metal oxide film to cause a resistance change according to an oxygen concentration in the film, an insulation film formed on the variable resistor, first and second electrodes to sandwich the variable resistor, and a third electrode opposite to the variable resistor across the insulation film. A writing operation is performed by applying a voltage to the third electrode to induce an electric field having a threshold value or more, in a direction perpendicular to an interface between the variable resistor and the insulation film, and a resistance state of the variable resistor is read by applying a voltage between the first and second electrodes.
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