发明授权
- 专利标题: Thin film transistor and method of manufacturing the same
- 专利标题(中): 薄膜晶体管及其制造方法
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申请号: US12990408申请日: 2009-04-28
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公开(公告)号: US08445902B2公开(公告)日: 2013-05-21
- 发明人: Ayumu Sato , Ryo Hayashi , Hisato Yabuta , Masafumi Sano
- 申请人: Ayumu Sato , Ryo Hayashi , Hisato Yabuta , Masafumi Sano
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc. IP Division
- 优先权: JP2008-121384 20080507
- 国际申请: PCT/JP2009/058724 WO 20090428
- 国际公布: WO2009/136645 WO 20091112
- 主分类号: H01L29/10
- IPC分类号: H01L29/10 ; H01L29/12
摘要:
Provided are a coplanar structure thin film transistor that allows a threshold voltage to change only a little under electric stress, and a method of manufacturing the same. The thin film transistor includes on a substrate at least: a gate electrode; a gate insulating layer; an oxide semiconductor layer including a source electrode, a drain electrode, and a channel region; a channel protection layer; and an interlayer insulating layer. The channel protection layer includes one or more layers, the layer in contact with the oxide semiconductor layer among the one or more layers being made of an insulating material containing oxygen, ends of the channel protection layer are thinner than a central part of the channel protection layer, the interlayer insulating layer contains hydrogen, and regions of the oxide semiconductor layer that are in direct contact with the interlayer insulating layer form the source electrode and the drain electrode.
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