Invention Grant
- Patent Title: Reconfigurable spectroscopic ellipsometer
- Patent Title (中): 可重构光谱椭偏仪
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Application No.: US13106940Application Date: 2011-05-13
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Publication No.: US08446584B2Publication Date: 2013-05-21
- Inventor: Shankar Krishnan , Haiming Wang
- Applicant: Shankar Krishnan , Haiming Wang
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- Main IPC: G01J4/00
- IPC: G01J4/00

Abstract:
A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.
Public/Granted literature
- US20120287433A1 Reconfigurable Spectroscopic Ellipsometer Public/Granted day:2012-11-15
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