Abstract:
The present invention may include an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light reflected from the surface of the sample, a selectably configurable optical system comprising: a rotatable polarizing element disposed in the illumination arm of the optical system, an analyzing element disposed in the collection arm of the optical system, and a rotatable-translatable compensator element disposed in the collection arm of the optical system, and a control system communicatively configured to selectably configure the optical system in the a rotating compensator (RCSE) mode, a rotating polarizer (RPSE) mode, or a rotating polarizer and compensator (RPRC) mode.
Abstract:
A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.
Abstract:
A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.
Abstract:
A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.
Abstract:
A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.
Abstract:
Methods and apparatus for measuring an optical azimuth angle φO of a substrate relative to a plane of detection in scatterometry tools are disclosed. A grating target on a stage of a scatterometry tool may be illuminated and positions of the resulting diffraction orders may be observed. The optical azimuth angle may be determined from the positions of the diffraction orders. Alternatively, polarization-dependent signals of radiation scattered from a line grating may be measured for equal and opposite polarization angles +A and −A. A combination signal may be computed from the polarization-dependent signals obtained at +A and −A and a property of the combination signal may be calculated for several mechanical Azimuth angles φM. A relationship between the optical azimuth angle φO and the mechanical azimuth angle φM may be determined from a behavior of the property as a function of mechanical azimuth angle φM.
Abstract:
A system for overhearing data or voice communications is provided. The system comprises at least one antenna operative to receive messages comprising data messages or voice messages, or both data and voice messages. A radio unit is in communication with the at least one antenna, with the radio unit operative to receive signals corresponding to the messages from the at least one antenna. A processor unit is in communication with the radio unit, with the processor unit operative to process the signals corresponding to the messages. A display unit is in communication with the processor unit, with the display unit operatively enabled in response to the signals corresponding to the messages. The display unit is operative to show the messages in a text format or a graphics format.
Abstract:
A method for providing uplink feedback optimization may include determining a set of candidate uplink subframes and corresponding component carriers to transmit uplink feedback, and determining a selected uplink subframe and corresponding component carrier from among the set of candidate uplink subframes based on a feedback delay associated with the set of candidate uplink subframes. A corresponding apparatus and computer program product are also provided.
Abstract:
A method, apparatus and computer program product are provided in order to allow an uplink resource request to be transmitted to the access point even in an instance in which the mobile terminal is receiving a continuous downlink transmission and repeated ACK/NACK transmissions are enabled. In this regard, a method, apparatus and computer program product are provided to prioritize a preamble transmission for a random access procedure relative to the repeated ACK/NACK transmissions. The method, apparatus and computer program also prioritize at least one message of the random access procedure.
Abstract:
The specification and drawings present a new method, apparatus and software related product (e.g., a computer readable memory) for implementing enhanced and flexible radio aperiodic measurements, e.g., on an unlicensed band in LTE wireless systems and providing effective and timely reporting. A UE may receive from a wireless network an aperiodic measurement request to measure a special measurement object (e.g., a neighbor cell) specified in the aperiodic measurement request, e.g., in an unlicensed band. In response to the aperiodic measurement request, the UE may perform the measurement of the special management object until a further instruction from the wireless network or for a determined period of time. Inter-frequency measurements may be performed during the measurement gap determined from the aperiodic measurement request.