发明授权
- 专利标题： Reconfigurable spectroscopic ellipsometer
- 专利标题（中）： 可重构光谱椭偏仪
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申请号： US13106940申请日： 2011-05-13
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公开(公告)号： US08446584B2公开(公告)日： 2013-05-21
- 发明人: Shankar Krishnan , Haiming Wang
- 申请人： Shankar Krishnan , Haiming Wang
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Corporation
- 当前专利权人： KLA-Tencor Corporation
- 当前专利权人地址： US CA Milpitas
- 代理机构： Luedeka Neely Group, P.C.
- 代理商 Rick Barnes
- 主分类号： G01J4/00
- IPC分类号： G01J4/00
摘要：
A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.
公开/授权文献
- US20120287433A1 Reconfigurable Spectroscopic Ellipsometer 公开/授权日：2012-11-15
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