发明授权
- 专利标题： Imprinted semiconductor multiplex detection array
- 专利标题（中）： 印刷半导体复用检测阵列
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申请号： US13004381申请日： 2011-01-11
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公开(公告)号： US08450131B2公开(公告)日： 2013-05-28
- 发明人: Steve M. Savoy , Jeremy J. John , Daniel R. Mitchell , Michael K. McAleer
- 申请人： Steve M. Savoy , Jeremy J. John , Daniel R. Mitchell , Michael K. McAleer
- 申请人地址： US TX Austin
- 专利权人： Nanohmics, Inc.
- 当前专利权人： Nanohmics, Inc.
- 当前专利权人地址： US TX Austin
- 代理机构： Cooke Law Firm
- 代理商 Claude E. Cooke, Jr.
- 主分类号： G01N27/414
- IPC分类号： G01N27/414 ; H01L27/088 ; H01L21/203 ; H01L29/06
摘要：
An array of sensor devices, each sensor including a set of semiconducting nanotraces having a width less than about 100 nm is provided. Method for fabricating the arrays is disclosed, providing a top-down approach for large arrays with multiple copies of the detection device in a single processing step. Nanodimensional sensing elements with precise dimensions and spacing to avoid the influence of electrodes are provided. The arrays may be used for multiplex detection of chemical and biomolecular species. The regular arrays may be combined with parallel synthesis of anchor probe libraries to provide a multiplex diagnostic device. Applications for gas phase sensing, chemical sensing and solution phase biomolecular sensing are disclosed.
公开/授权文献
- US20120178199A1 Imprinted Semiconductor Multiplex Detection Array 公开/授权日：2012-07-12
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