Invention Grant
- Patent Title: Thermally activated micromirror and fabrication method
- Patent Title (中): 热活化微镜及其制造方法
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Application No.: US13001247Application Date: 2008-06-24
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Publication No.: US08450132B2Publication Date: 2013-05-28
- Inventor: Nicolas Abele , Faouzi Khechana , Philippe Renaud
- Applicant: Nicolas Abele , Faouzi Khechana , Philippe Renaud
- Applicant Address: CH Lausanne
- Assignee: Ecole Polytechnique Federale de Lausanne (EPFL)
- Current Assignee: Ecole Polytechnique Federale de Lausanne (EPFL)
- Current Assignee Address: CH Lausanne
- Agency: Howard IP Law Group, P.C.
- International Application: PCT/EP2008/058018 WO 20080624
- International Announcement: WO2009/155968 WO 20091230
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for fabricating a micromirror in a wafer, including the steps of: depositing and etching layers forming two arms; etching the wafer such that in the back face only a thin portion of the wafer remains in the region of formation of the micromirror and the arms; performing an anisotropic etch, such that the thin portion remains only in the areas of the micromirror and the arms; and performing an isotropic etch to remove the thin portions under the arms, the etching step for forming the arms being performed following their shape and so as to form holes traversing the arms, the holes being positioned at edges of the region separating the micromirror and the wafer on both the side of the micromirror and the side of the portions of the wafer remaining after the anisotropic etching step. The invention also concerns the micromirror.
Public/Granted literature
- US20110217804A1 THERMALLY ACTIVATED MICROMIRROR AND FABRICATION METHOD Public/Granted day:2011-09-08
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