发明授权
- 专利标题: Bumping process and structure thereof
- 专利标题(中): 冲击过程及其结构
-
申请号: US13187353申请日: 2011-07-20
-
公开(公告)号: US08450203B2公开(公告)日: 2013-05-28
- 发明人: Chin-Tang Hsieh , Chih-Ming Kuo
- 申请人: Chin-Tang Hsieh , Chih-Ming Kuo
- 申请人地址: TW Hsinchu
- 专利权人: Chipbond Technology Corporation
- 当前专利权人: Chipbond Technology Corporation
- 当前专利权人地址: TW Hsinchu
- 代理机构: Jackson IPG PLLC
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
A bumping process comprises steps of forming a metal layer with copper on a substrate, and the metal layer with copper comprises a plurality of first zones and second zones; forming a photoresist layer on the metal layer with copper; patterning the photoresist layer to form a plurality of openings; forming a plurality of copper bumps within the openings, each of the copper bumps covers the first zones and comprises a first top surface; forming a connection layer on the first top surface; removing the photoresist layer; removing the second zones and enabling each of the first zones to form an under bump metallurgy layer, wherein the under bump metallurgy layer, the copper bump, and the connection layer possess their corresponded peripheral walls, and covering sections of a first protective layer formed on the connection layer may cover those peripheral walls to prevent ionization phenomenon.
公开/授权文献
- US20130022830A1 BUMPING PROCESS AND STRUCTURE THEREOF 公开/授权日:2013-01-24
信息查询
IPC分类: