发明授权
- 专利标题： Particle beam systems and methods
- 专利标题（中）： 粒子束系统和方法
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申请号： US12806111申请日： 2010-08-05
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公开(公告)号： US08450215B2公开(公告)日： 2013-05-28
- 发明人: Hubert Mantz , Rainer Arnold , Michael Albiez
- 申请人： Hubert Mantz , Rainer Arnold , Michael Albiez
- 申请人地址： DE Jena
- 专利权人： Carl Zeiss Microscopy GmbH
- 当前专利权人： Carl Zeiss Microscopy GmbH
- 当前专利权人地址： DE Jena
- 代理商 Bruce D. Riter
- 优先权： DE102009036701 20090807
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; H01L21/461
摘要：
An inspection method comprises focusing a particle beam onto a sample; operating at least one detector located close to the sample; assigning detection signals generated by the at least one detector to different intensity intervals; determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector; and determining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector.
公开/授权文献
- US20110031215A1 Particle beam systems and methods 公开/授权日：2011-02-10
信息查询
IPC分类:
