Invention Grant
US08456614B2 Optical element supporting device, exposure apparatus using same, and device manufacturing method
有权
光学元件支撑装置,使用其的曝光装置和装置制造方法
- Patent Title: Optical element supporting device, exposure apparatus using same, and device manufacturing method
- Patent Title (中): 光学元件支撑装置,使用其的曝光装置和装置制造方法
-
Application No.: US12608796Application Date: 2009-10-29
-
Publication No.: US08456614B2Publication Date: 2013-06-04
- Inventor: Hiroyuki Tomita
- Applicant: Hiroyuki Tomita
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc IP Division
- Priority: JP2008-279652 20081030
- Main IPC: G02B7/02
- IPC: G02B7/02 ; G03B27/42 ; G03B27/52 ; G03B27/54

Abstract:
The optical element supporting device of the present invention includes a first supporting member that supports the optical element, a second supporting member that supports the first supporting member at a plurality of locations, a plate spring fastened to the first supporting member and having a plate thickness extending in the optical axis direction of the optical element, and a force supplying unit, which is provided on the first supporting member, configured to provide a force in the optical axis direction applied to the plate spring at a location different from the plurality of locations, wherein the force supplying unit elastically deforms the first supporting member by receiving the reactive force generated by the force applied to the plate spring to thereby adjust the position of the optical element.
Public/Granted literature
- US20100110404A1 OPTICAL ELEMENT SUPPORTING DEVICE, EXPOSURE APPARATUS USING SAME, AND DEVICE MANUFACTURING METHOD Public/Granted day:2010-05-06
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |