发明授权
- 专利标题: Method for providing a perpendicular magnetic recording transducer using a low energy mill
- 专利标题(中): 使用低能量磨机提供垂直磁记录传感器的方法
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申请号: US12777609申请日: 2010-05-11
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公开(公告)号: US08458892B2公开(公告)日: 2013-06-11
- 发明人: Weimin Si , Yun-Fei Li , Ying Hong
- 申请人: Weimin Si , Yun-Fei Li , Ying Hong
- 申请人地址: US CA Fremont
- 专利权人: Western Digital (Fremont), LLC
- 当前专利权人: Western Digital (Fremont), LLC
- 当前专利权人地址: US CA Fremont
- 主分类号: G11B5/187
- IPC分类号: G11B5/187
摘要:
A method for fabricating magnetic transducer is described. The method includes providing a main pole having a bottom and a top wider than the bottom. The method further includes performing a high energy ion mill at an angle from a normal to the to of the main pole and at a first energy. The high energy ion mill removes a portion of the top of the main pole and exposes a top bevel surface for the main pole. The method also includes performing a low energy ion mill at second energy and a glancing angle from the top bevel surface. The glancing angle is not more than fifteen degrees. The second energy is less than the first energy. The method and system also include depositing a nonmagnetic gap.
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