Invention Grant
US08459128B2 Sub-threshold elastic deflection FET sensor for sensing pressure/force, a method and system thereof
失效
用于感测压力/力的次阈值弹性偏转FET传感器，其方法和系统
- Patent Title: Sub-threshold elastic deflection FET sensor for sensing pressure/force, a method and system thereof
- Patent Title (中): 用于感测压力/力的次阈值弹性偏转FET传感器，其方法和系统
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Application No.: US12937638Application Date: 2008-06-19
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Publication No.: US08459128B2Publication Date: 2013-06-11
- Inventor: Navakanta Bhat , Rudra Pratap , Malhi Charanjeet Kaur
- Applicant: Navakanta Bhat , Rudra Pratap , Malhi Charanjeet Kaur
- Applicant Address: IN Bangalore
- Assignee: Indian Institute of Science
- Current Assignee: Indian Institute of Science
- Current Assignee Address: IN Bangalore
- Agency: Banner & Witcoff, Ltd.
- Priority: IN00929/CHE/2008 20080415
- International Application: PCT/IN2008/000387 WO 20080619
- International Announcement: WO2009/128084 WO 20091022
- Main IPC: G01L1/12
- IPC: G01L1/12
Abstract:
The present invention relates to high sensitivity elastic deflection sensors, more particularly related to capacitively coupled FET based elastic deflection sensors. A sub-threshold elastic deflection FET sensor for sensing pressure/force comprises an elastic member forming a moving gate of the sensor, fixed dielectric on substrate of the FET, and a fluid dielectric between the elastic member and the fixed dielectric, wherein alteration in the height of the fluid dielectric (TSENS) due to pressure/force on the elastic member varies the sensor gate capacitance.
Public/Granted literature
- US20110023632A1 SUB-THRESHOLD ELASTIC DEFLECTION FET SENSOR FOR SENSING PRESSURE/FORCE, A METHOD AND SYSTEM THEREOF Public/Granted day:2011-02-03
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