SUB-THRESHOLD ELASTIC DEFLECTION FET SENSOR FOR SENSING PRESSURE/FORCE, A METHOD AND SYSTEM THEREOF
    1.
    发明申请
    SUB-THRESHOLD ELASTIC DEFLECTION FET SENSOR FOR SENSING PRESSURE/FORCE, A METHOD AND SYSTEM THEREOF 失效
    用于传感压力/力的亚阈值弹性偏转场敏感器,其方法和系统

    公开(公告)号:US20110023632A1

    公开(公告)日:2011-02-03

    申请号:US12937638

    申请日:2008-06-19

    IPC分类号: G01L1/14 H01L29/84

    摘要: The present invention relates to high sensitivity elastic deflection sensors, more particularly related to capacitively coupled FET based elastic deflection sensors. A sub-threshold elastic deflection FET sensor for sensing pressure/force comprises an elastic member forming a moving gate of the sensor, fixed dielectric on substrate of the FET, and a fluid dielectric between the elastic member and the fixed dielectric, wherein alteration in the height of the fluid dielectric (TSENS) due to pressure/force on the elastic member varies the sensor gate capacitance.

    摘要翻译: 本发明涉及高灵敏度弹性偏转传感器,更具体地涉及基于电容耦合FET的弹性偏转传感器。 用于感测压力/力的亚阈值弹性偏转FET传感器包括形成传感器的移动栅极的弹性构件,FET的衬底上的固定电介质,以及弹性构件和固定电介质之间的流体电介质,其中, 由于弹性构件上的压力/力引起的流体介质(TSENS)的高度改变传感器栅极电容。

    Sub-threshold elastic deflection FET sensor for sensing pressure/force, a method and system thereof
    3.
    发明授权
    Sub-threshold elastic deflection FET sensor for sensing pressure/force, a method and system thereof 失效
    用于感测压力/力的次阈值弹性偏转FET传感器,其方法和系统

    公开(公告)号:US08459128B2

    公开(公告)日:2013-06-11

    申请号:US12937638

    申请日:2008-06-19

    IPC分类号: G01L1/12

    摘要: The present invention relates to high sensitivity elastic deflection sensors, more particularly related to capacitively coupled FET based elastic deflection sensors. A sub-threshold elastic deflection FET sensor for sensing pressure/force comprises an elastic member forming a moving gate of the sensor, fixed dielectric on substrate of the FET, and a fluid dielectric between the elastic member and the fixed dielectric, wherein alteration in the height of the fluid dielectric (TSENS) due to pressure/force on the elastic member varies the sensor gate capacitance.

    摘要翻译: 本发明涉及高灵敏度弹性偏转传感器,更具体地涉及基于电容耦合FET的弹性偏转传感器。 用于感测压力/力的亚阈值弹性偏转FET传感器包括形成传感器的移动栅极的弹性构件,FET的衬底上的固定电介质,以及弹性构件和固定电介质之间的流体电介质,其中, 由于弹性构件上的压力/力引起的流体介质(TSENS)的高度改变传感器栅极电容。

    Sub-Threshold Capfet Sensor for Sensing Analyte, A Method and System Thereof
    4.
    发明申请
    Sub-Threshold Capfet Sensor for Sensing Analyte, A Method and System Thereof 审中-公开
    用于感应分析物的次阈值Capfet传感器,其方法和系统

    公开(公告)号:US20110031986A1

    公开(公告)日:2011-02-10

    申请号:US12937243

    申请日:2008-06-19

    IPC分类号: G01N27/22

    CPC分类号: G01N27/4143

    摘要: The present invention relates to high sensitivity chemical sensors, more particularly relates to high sensitivity chemical sensors which are capacitively coupled, FET based analyte sensors. A sub-threshold capacitively coupled Field Effect Transistor (CapFET) sensor for sensing an analyte comprises fixed dielectric placed on substrate of the CapFET and second dielectric sensitive to the analyte, placed between gate terminal of the CapFET and the fixed dielectric, wherein presence of the analyte alters either dielectric constant of the second dielectric or work function of the gate.

    摘要翻译: 本发明涉及高灵敏度化学传感器,更具体地涉及电容耦合的基于FET的分析物传感器的高灵敏度化学传感器。 用于感测分析物的亚阈值电容耦合场效应晶体管(CapFET)传感器包括放置在CapFET的衬底上的固定电介质和放置在CapFET的栅极端子与固定电介质之间的分析物敏感的第二电介质, 分析物改变了第二介质的介电常数或栅极的功函数。

    Sub-threshold forced plate FET sensor for sensing inertial displacements, a method and system thereof
    5.
    发明授权
    Sub-threshold forced plate FET sensor for sensing inertial displacements, a method and system thereof 失效
    用于感测惯性位移的次阈强制板式FET传感器,其方法和系统

    公开(公告)号:US08434374B2

    公开(公告)日:2013-05-07

    申请号:US12937023

    申请日:2008-06-19

    IPC分类号: G01L1/12

    摘要: The present invention relates to a Sub-threshold Field Effect Transistor (SF-FET). The invention integrates a MEMS mechanical transducer along with the sensing mechanism in a single device. Forced mass is capacitively coupled onto the FET structure. Dielectric SiO2 forms good interface with underlying silicon substrate. Air dielectric forms second dielectric wherein effective gate capacitance is the series combination of the second dielectric capacitance and fixed dielectric. Inertial displacements are sensed by observing change in drain current (ID) of the sensor due to change in gap height (TGap) of the second dielectric of the sensor caused by forced mass.

    摘要翻译: 子阈值场效应晶体管(SF-FET)技术领域本发明涉及一种次阈值场效应晶体管(SF-FET)。 本发明将MEMS机械传感器与感测机构一起集成在单个装置中。 强制质量电容耦合到FET结构上。 电介质SiO 2与底层硅衬底形成良好的界面。 空气电介质形成第二电介质,其中有效栅极电容是第二介电电容和固定电介质的串联组合。 通过观察由于强制质量引起的传感器的第二电介质的间隙高度(TGap)的变化,传感器的漏极电流(ID)的变化来检测惯性位移。

    Sub-Threshold Forced Plate FET Sensor for Sensing Inertial Displacements, a Method and System Thereof
    6.
    发明申请
    Sub-Threshold Forced Plate FET Sensor for Sensing Inertial Displacements, a Method and System Thereof 失效
    用于感应惯性位移的次阈值强制板式FET传感器,其方法和系统

    公开(公告)号:US20110050201A1

    公开(公告)日:2011-03-03

    申请号:US12937023

    申请日:2008-06-19

    IPC分类号: G01N27/00 H01L29/772

    摘要: The present invention relates to a Sub-threshold Field Effect Transistor (SF-FET). The invention integrates a MEMS mechanical transducer along with the sensing mechanism in a single device. Forced mass is capacitively coupled onto the FET structure. Dielectric SiO2 forms good interface with underlying silicon substrate. Air dielectric forms second dielectric wherein effective gate capacitance is the series combination of the second dielectric capacitance and fixed dielectric. Inertial displacements are sensed by observing change in drain current (ID) of the sensor due to change in gap height (T Gap) of the second dielectric of the sensor caused by forced mass.

    摘要翻译: 子阈值场效应晶体管(SF-FET)技术领域本发明涉及一种次阈值场效应晶体管(SF-FET)。 本发明将MEMS机械传感器与感测机构一起集成在单个装置中。 强制质量电容耦合到FET结构上。 电介质SiO 2与底层硅衬底形成良好的界面。 空气电介质形成第二电介质,其中有效栅极电容是第二介电电容和固定电介质的串联组合。 通过观察由于强制质量引起的传感器的第二电介质的间隙高度(T间隙)的变化,传感器的漏极电流(ID)的变化来检测惯性位移。