发明授权
US08460783B2 Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these
失效
清洁片，具有清洁功能的转印部件以及用这些清洁基板处理装置的方法
- 专利标题： Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these
- 专利标题（中）： 清洁片，具有清洁功能的转印部件以及用这些清洁基板处理装置的方法
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申请号： US12045326申请日： 2008-03-10
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公开(公告)号： US08460783B2公开(公告)日： 2013-06-11
- 发明人: Makoto Namikawa , Yoshio Terada , Jirou Nukaga
- 申请人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga
- 申请人地址： JP Osaka
- 专利权人： Nitto Denko Corporation
- 当前专利权人： Nitto Denko Corporation
- 当前专利权人地址： JP Osaka
- 代理机构： Sughrue Mion, PLLC
- 主分类号： B32B3/26
- IPC分类号： B32B3/26 ; B32B7/12 ; B32B9/04
摘要：
A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.