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1.发明授权Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them 有权清洁片，使用其的输送部件，以及使用它们的基板处理设备清洗方法公开(公告)号：US07793668B2
公开(公告)日：2010-09-14
申请号：US11014779
申请日：2004-12-20
申请人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
发明人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
IPC分类号： B08B3/00
CPC分类号： B08B1/00 , B08B7/00 , B08B7/0028 , Y10T428/2848 , Y10T428/31721
摘要： A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
摘要翻译： 提供了一种用于清除离开基板处理设备内部的异物的清洁片。 清洁片包括基本上没有粘性并且根据JIS K7127测定的拉伸模量不低于0.98N / mm 2的清洁层。 或者，清洁片包括维氏硬度不低于10MPa的清洁层。
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2.发明授权Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them 有权清洁片，使用其的输送部件，以及使用它们的基板处理设备清洗方法公开(公告)号：US07713356B2
公开(公告)日：2010-05-11
申请号：US10297173
申请日：2001-05-08
申请人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda
发明人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda
CPC分类号： B08B1/00 , B08B7/00 , B08B7/0028 , Y10T156/1052 , Y10T428/2481 , Y10T428/24818 , Y10T428/249982
摘要： A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10.
摘要翻译： 提供了一种用于清除离开基板处理设备内部的异物的清洁片。 清洁片包括基本上没有粘性并且根据JIS K7127测定的拉伸模量不低于0.98N / mm 2的清洁层。 或者，清洁片包括维氏硬度不低于10的清洁层。
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3.发明授权Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these 失效清洁片，具有清洁功能的转印部件以及用这些清洁基板处理装置的方法公开(公告)号：US08460783B2
公开(公告)日：2013-06-11
申请号：US12045326
申请日：2008-03-10
申请人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga
发明人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga
CPC分类号： H01L21/6835 , B08B1/00 , B08B7/0028 , C11D17/049 , G11B23/505 , H01J2237/022 , H05K3/26 , Y10T428/24942 , Y10T428/249953 , Y10T428/249978 , Y10T428/24998 , Y10T428/249982 , Y10T428/249983 , Y10T428/28 , Y10T428/31504
摘要： A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.
摘要翻译： 一种清洁片，其包括多孔层作为清洁层; 或清洁片，其包括具有多孔层的片材，并且在片材的一侧上形成粘合剂层。
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4.发明申请CLEANING SHEET, CONVEYING MEMBER USING THE SAME, AND SUBSTRATE PROCESSING EQUIPMENT CLEANING METHOD USING THEM 审中-公开使用它们的清洁片，输送构件和使用它们的基板处理设备清洁方法公开(公告)号：US20100319151A1
公开(公告)日：2010-12-23
申请号：US12851797
申请日：2010-08-06
申请人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
发明人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
IPC分类号： A47L25/00
CPC分类号： B08B1/00 , B08B7/00 , B08B7/0028 , Y10T428/2848 , Y10T428/31721
摘要： A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
摘要翻译： 提供了一种用于清除离开基板处理设备内部的异物的清洁片。 清洁片包括基本上没有粘性并且根据JIS K7127测定的拉伸模量不低于0.98N / mm 2的清洁层。 或者，清洁片包括维氏硬度不低于10MPa的清洁层。
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5.发明申请Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them 审中-公开清洁片，使用其的输送部件，以及使用它们的基板处理设备清洗方法公开(公告)号：US20060105164A1
公开(公告)日：2006-05-18
申请号：US11229586
申请日：2005-09-20
申请人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
发明人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
CPC分类号： B08B1/00 , B08B7/00 , B08B7/0028 , C08G73/12 , C08G73/16 , C08J7/047 , C08J2409/00 , C08J2479/00 , G11B5/41 , Y10T428/28 , Y10T442/2738
摘要： A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
摘要翻译： 提供了一种用于清除离开基板处理设备内部的异物的清洁片。 清洁片包括基本上没有粘性并且根据JIS K7127测定的拉伸模量不低于0.98N / mm 2的清洁层。 或者，清洁片包括维氏硬度不低于10MPa的清洁层。
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6.发明申请Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these 审中-公开清洁片，具有清洁功能的转印部件以及用这些清洁基板处理装置的方法公开(公告)号：US20070104939A1
公开(公告)日：2007-05-10
申请号：US11643774
申请日：2006-12-22
申请人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga
发明人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga
CPC分类号： H01L21/6835 , B08B1/00 , B08B7/0028 , C11D17/049 , G11B23/505 , H01J2237/022 , H05K3/26 , Y10T428/24942 , Y10T428/249953 , Y10T428/249978 , Y10T428/24998 , Y10T428/249982 , Y10T428/249983 , Y10T428/28 , Y10T428/31504
摘要： A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.
摘要翻译： 一种清洁片，其包括多孔层作为清洁层; 或清洁片，其包括具有多孔层的片材，并且在片材的一侧上形成粘合剂层。
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7.发明申请Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them 有权清洁片，使用其的输送部件，以及使用它们的基板处理设备清洗方法公开(公告)号：US20050244632A1
公开(公告)日：2005-11-03
申请号：US11014779
申请日：2004-12-20
申请人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
发明人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
CPC分类号： B08B1/00 , B08B7/00 , B08B7/0028 , Y10T428/2848 , Y10T428/31721
摘要： A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
摘要翻译： 提供了一种用于清除离开基板处理设备内部的异物的清洁片。 清洁片包括基本上没有粘性并且根据JIS K7127测定的拉伸模量不低于0.98N / mm 2的清洁层。 或者，清洁片包括维氏硬度不低于10MPa的清洁层。
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8.发明申请Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these 审中-公开清洁片，具有清洁功能的转印部件以及用这些清洁基板处理装置的方法公开(公告)号：US20050118414A1
公开(公告)日：2005-06-02
申请号：US11000007
申请日：2004-12-01
申请人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga
发明人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga
CPC分类号： H01L21/6835 , B08B1/00 , B08B7/0028 , C11D17/049 , G11B23/505 , H01J2237/022 , H05K3/26 , Y10T428/24942 , Y10T428/249953 , Y10T428/249978 , Y10T428/24998 , Y10T428/249982 , Y10T428/249983 , Y10T428/28 , Y10T428/31504
摘要： A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.
摘要翻译： 一种清洁片，其包括多孔层作为清洁层; 或清洁片，其包括具有多孔层的片材，并且在片材的一侧上形成粘合剂层。
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9.发明授权Cleaning sheet and process for cleaning substrate treatment device using same 失效清洁片和使用其的基板处理装置的清洁处理公开(公告)号：US07575790B2
公开(公告)日：2009-08-18
申请号：US10497469
申请日：2002-10-31
申请人： Yoshio Terada , Makoto Namikawa
发明人： Yoshio Terada , Makoto Namikawa
CPC分类号： B08B7/0028 , C11D17/049 , Y10T428/14 , Y10T428/1452 , Y10T428/1457 , Y10T428/1471 , Y10T428/1476 , Y10T428/2839 , Y10T428/2848
摘要： A cleaning sheet comprising: a cleaning layer; and a protective film treated with a releasing agent comprising a silicone, the protective film being provided as a separator on at least one side of the cleaning layer, wherein an amount of silicone attached to the cleaning layer when the separator is peeled off from the cleaning layer is 0.005 g/m2 or less as calculated in terms of polydimethylsiloxane.
摘要翻译： 一种清洁片，包括：清洁层; 以及由包含硅酮的脱模剂处理的保护膜，所述保护膜在所述清洁层的至少一侧设置为隔膜，其中当所述隔板从所述清洁层剥离时附着到所述清洁层上的硅氧化物量 根据聚二甲基硅氧烷计算，层为0.005g / m 2以下。
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10.发明申请Cleaning sheet and process for cleaning substrate treatment device using same 失效清洁片和使用其的基板处理装置的清洁处理公开(公告)号：US20050048241A1
公开(公告)日：2005-03-03
申请号：US10497469
申请日：2002-10-31
申请人： Yoshio Terada , Makoto Namikawa
发明人： Yoshio Terada , Makoto Namikawa
CPC分类号： B08B7/0028 , C11D17/049 , Y10T428/14 , Y10T428/1452 , Y10T428/1457 , Y10T428/1471 , Y10T428/1476 , Y10T428/2839 , Y10T428/2848
摘要： A cleaning sheet comprising: a cleaning layer; and a protective film treated with a releasing agent comprising a silicone, the protective film being provided as a separator on at least one side of the cleaning layer, wherein an amount of silicone attached to the cleaning layer when the separator is peeled off from the cleaning layer is 0.005 g/m2 or less as calculated in terms of polydimethylsiloxane.
摘要翻译： 一种清洁片，包括：清洁层; 以及由包含硅酮的脱模剂处理的保护膜，所述保护膜作为隔膜设置在所述清洁层的至少一侧上，其中当所述隔板从所述清洁层剥离时附着到所述清洁层上的硅氧化物量 层以聚二甲基硅氧烷计算为0.005g / m 2以下。
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