Invention Grant
- Patent Title: Method for fabricating InGaN-based multi-quantum well layers
- Patent Title (中): 制造基于InGaN的多量子阱层的方法
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Application No.: US13566616Application Date: 2012-08-03
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Publication No.: US08461029B2Publication Date: 2013-06-11
- Inventor: Fengyi Jiang , Li Wang , Chunlan Mo , Wenqing Fang
- Applicant: Fengyi Jiang , Li Wang , Chunlan Mo , Wenqing Fang
- Applicant Address: CN Nanchang
- Assignee: Lattice Power (JIANGXI) Corporation
- Current Assignee: Lattice Power (JIANGXI) Corporation
- Current Assignee Address: CN Nanchang
- Agency: Park, Vaughan, Fleming & Dowler LLP
- Agent Shun Yao
- Priority: WOPCT/CN2008/001488 20080819
- Main IPC: H01L21/0254
- IPC: H01L21/0254

Abstract:
A method for fabricating quantum wells by using indium gallium nitride (InGaN) semiconductor material includes fabricating a potential well on a layered group III-V nitride structure at a first predetermined temperature in a reactor chamber by injecting into the reactor chamber an In precursor gas and a Ga precursor gas. The method further includes, subsequent to the fabrication of the potential well, terminating the Ga precursor gas, maintaining a flow of the In precursor gas, and increasing the temperature in the reactor chamber to a second predetermined temperature while adjusting the In precursor gas flow rate from a first to a second flow rate. In addition, the method includes annealing and stabilizing the potential well at the second predetermined temperature while maintaining the second flow rate. The method also includes fabricating a potential barrier above the potential well at the second predetermined temperature while resuming the Ga precursor gas.
Public/Granted literature
- US20120295422A1 METHOD FOR FABRICATING InGaN-BASED MULTI-QUANTUM WELL LAYERS Public/Granted day:2012-11-22
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