发明授权
- 专利标题： LPP EUV light source drive laser system
- 专利标题（中）： LPP EUV光源驱动激光系统
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申请号： US13087207申请日： 2011-04-14
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公开(公告)号： US08461560B2公开(公告)日： 2013-06-11
- 发明人: Alexander I. Ershov , Alexander N. Bykanov , Oleh V. Khodykin , Igor V. Fomenkov
- 申请人： Alexander I. Ershov , Alexander N. Bykanov , Oleh V. Khodykin , Igor V. Fomenkov
- 申请人地址： US CA San Diego
- 专利权人： Cymer, Inc.
- 当前专利权人： Cymer, Inc.
- 当前专利权人地址： US CA San Diego
- 代理机构： Cymer, Inc.
- 主分类号： G01N21/00
- IPC分类号： G01N21/00 ; G01N21/33 ; H05G2/00
摘要：
An apparatus and method is disclosed which includes or employs an EUV light source comprising a laser device outputting a laser beam, a beam delivery system directing the laser beam to an irradiation site, and a material for interaction with the laser beam at the irradiation site to create an EUV light emitting plasma for use in processing substrates.
公开/授权文献
- US20110192995A1 LPP EUV Light Source Drive Laser System 公开/授权日：2011-08-11
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