Invention Grant
US08461643B2 High-density flash memory cell stack, cell stack string, and fabrication method thereof
有权
高密度闪存单元堆叠,单元堆叠串及其制造方法
- Patent Title: High-density flash memory cell stack, cell stack string, and fabrication method thereof
- Patent Title (中): 高密度闪存单元堆叠,单元堆叠串及其制造方法
-
Application No.: US13123458Application Date: 2009-09-24
-
Publication No.: US08461643B2Publication Date: 2013-06-11
- Inventor: Jong-Ho Lee
- Applicant: Jong-Ho Lee
- Applicant Address: KR
- Assignee: SNU R & DB Foundation
- Current Assignee: SNU R & DB Foundation
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2008-0099231 20081009
- International Application: PCT/KR2009/005463 WO 20090924
- International Announcement: WO2010/041838 WO 20100415
- Main IPC: H01L27/115
- IPC: H01L27/115

Abstract:
A flash memory cell stack includes a semiconductor substrate; a control electrode formed in a vertical pillar shape on a surface of the semiconductor substrate; an insulating film formed between the control electrode and the semiconductor substrate; a gate stack formed on a side surface of the control electrode; a plurality of first insulating films formed as layers on a side surface of the gate stack; a plurality of second doping semiconductor areas formed as layers on a side surface of the gate stack; and a first doping semiconductor area formed on a portion of side surfaces of the first insulating films and the second doping semiconductor areas and formed on side surfaces facing each other in a first direction. The first insulating films and the second doping semiconductor areas are alternately provided on the side surface of the gate stack.
Public/Granted literature
- US20110198687A1 HIGH-DENSITY FLASH MEMORY CELL STACK, CELL STACK STRING, AND FABRICATION METHOD THEREOF Public/Granted day:2011-08-18
Information query
IPC分类: