Invention Grant
US08461643B2 High-density flash memory cell stack, cell stack string, and fabrication method thereof 有权
高密度闪存单元堆叠,单元堆叠串及其制造方法

  • Patent Title: High-density flash memory cell stack, cell stack string, and fabrication method thereof
  • Patent Title (中): 高密度闪存单元堆叠,单元堆叠串及其制造方法
  • Application No.: US13123458
    Application Date: 2009-09-24
  • Publication No.: US08461643B2
    Publication Date: 2013-06-11
  • Inventor: Jong-Ho Lee
  • Applicant: Jong-Ho Lee
  • Applicant Address: KR
  • Assignee: SNU R & DB Foundation
  • Current Assignee: SNU R & DB Foundation
  • Current Assignee Address: KR
  • Agency: Cantor Colburn LLP
  • Priority: KR10-2008-0099231 20081009
  • International Application: PCT/KR2009/005463 WO 20090924
  • International Announcement: WO2010/041838 WO 20100415
  • Main IPC: H01L27/115
  • IPC: H01L27/115
High-density flash memory cell stack, cell stack string, and fabrication method thereof
Abstract:
A flash memory cell stack includes a semiconductor substrate; a control electrode formed in a vertical pillar shape on a surface of the semiconductor substrate; an insulating film formed between the control electrode and the semiconductor substrate; a gate stack formed on a side surface of the control electrode; a plurality of first insulating films formed as layers on a side surface of the gate stack; a plurality of second doping semiconductor areas formed as layers on a side surface of the gate stack; and a first doping semiconductor area formed on a portion of side surfaces of the first insulating films and the second doping semiconductor areas and formed on side surfaces facing each other in a first direction. The first insulating films and the second doping semiconductor areas are alternately provided on the side surface of the gate stack.
Information query
Patent Agency Ranking
0/0