发明授权
US08462239B2 Solid-state imaging device and electronic imaging device having multi-stage element isolation layer 有权
具有多级元件隔离层的固态成像装置和电子成像装置

Solid-state imaging device and electronic imaging device having multi-stage element isolation layer
摘要:
A solid-state imaging device and an electronic device that includes the solid-state imaging device prevents shifting of a photoelectric conversion region due to long-wavelength light passing to subsurface portions of the solid-state imagine device. The device include a photo diode having an upper layer of a first conductivity type formed over a second layer having an accumulation region of a second conductivity type. The upper layer is a light-receiving portion of the photodiode. A multi-stage element isolation layer is included and has a plurality of layers of the first conductivity type, such that a first lateral side of a first stage of the multi-stage layer abuts the accumulation portion, and a second stage of the multi-stage layer is separated by a width W from the accumulation region of an intermediate portion of a second conductivity type.
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