Invention Grant
US08465995B2 Array substrate for fringe field switching mode liquid crystal display and method of manufacturing the same 有权
用于条纹场开关模式液晶显示器的阵列衬底及其制造方法

Array substrate for fringe field switching mode liquid crystal display and method of manufacturing the same
Abstract:
A method of manufacturing an array substrate for a fringe field switching mode liquid crystal display includes: forming an auxiliary insulating layer having a first thickness; forming first and second photoresist patterns on the auxiliary insulating layer; performing an ashing to remove the second photoresist pattern and expose the auxiliary insulating layer therebelow; performing a dry etching to remove the auxiliary insulating layer not covered by the first photoresist pattern and expose a first passivation layer and to form an insulating pattern below the first photoresist pattern, the insulating pattern and the first photoresist pattern forming an undercut shape; forming a transparent conductive material layer having a fourth thickness less than the first thickness; and performing a lift-off process to remove the first photoresist pattern and the transparent conductive material layer thereon together and form a pixel electrode.
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