Invention Grant
- Patent Title: Array substrate for fringe field switching mode liquid crystal display and method of manufacturing the same
- Patent Title (中): 用于条纹场开关模式液晶显示器的阵列衬底及其制造方法
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Application No.: US13301015Application Date: 2011-11-21
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Publication No.: US08465995B2Publication Date: 2013-06-18
- Inventor: Young-Ki Jung , Seok-Woo Lee , Kum-Mi Oh , Dong-Cheon Shin , In-Hyuk Song , Han-Seok Lee , Won-Keun Park
- Applicant: Young-Ki Jung , Seok-Woo Lee , Kum-Mi Oh , Dong-Cheon Shin , In-Hyuk Song , Han-Seok Lee , Won-Keun Park
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Morgan, Lewis & Bockius LLP
- Priority: KR10-2011-0064733 20110630
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84 ; G02F1/1337 ; G02F1/1343

Abstract:
A method of manufacturing an array substrate for a fringe field switching mode liquid crystal display includes: forming an auxiliary insulating layer having a first thickness; forming first and second photoresist patterns on the auxiliary insulating layer; performing an ashing to remove the second photoresist pattern and expose the auxiliary insulating layer therebelow; performing a dry etching to remove the auxiliary insulating layer not covered by the first photoresist pattern and expose a first passivation layer and to form an insulating pattern below the first photoresist pattern, the insulating pattern and the first photoresist pattern forming an undercut shape; forming a transparent conductive material layer having a fourth thickness less than the first thickness; and performing a lift-off process to remove the first photoresist pattern and the transparent conductive material layer thereon together and form a pixel electrode.
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