发明授权
US08466534B2 Radiation detector, and a radiographic apparatus having the same
有权
放射线检测器和具有该辐射检测器的射线照相设备
- 专利标题: Radiation detector, and a radiographic apparatus having the same
- 专利标题(中): 放射线检测器和具有该辐射检测器的射线照相设备
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申请号: US13203769申请日: 2010-03-26
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公开(公告)号: US08466534B2公开(公告)日: 2013-06-18
- 发明人: Shingo Furui , Toshinori Yoshimuta , Junichi Suzuki , Koji Watadani , Satoru Morita
- 申请人: Shingo Furui , Toshinori Yoshimuta , Junichi Suzuki , Koji Watadani , Satoru Morita
- 申请人地址: JP Kyoto
- 专利权人: Shimadzu Corporation
- 当前专利权人: Shimadzu Corporation
- 当前专利权人地址: JP Kyoto
- 代理机构: Cheng Law Group, PLLC
- 优先权: JP2009-091023 20090403
- 国际申请: PCT/JP2010/002195 WO 20100326
- 国际公布: WO2010/113451 WO 20101007
- 主分类号: H01L271/46
- IPC分类号: H01L271/46
摘要:
The construction of this invention includes an active matrix substrate, an amorphous selenium layer, a high resistance layer, a gold electrode layer, an insulating layer and an auxiliary plate laminated in this order. In one aspect of the present invention, the insulating layer has an inorganic anion exchanger added thereto in order to provide a radiation detector which prevents void formation and pinhole formation in the amorphous semiconductor layer and carrier selective high resistance film, without accumulating electric charges on the auxiliary plate. The inorganic anion exchanger adsorbs chloride ions in the insulating layer, thereby preventing destruction of X-ray detector due to the chloride ions drawn to the gold electrode layer.
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