Invention Grant
- Patent Title: Gold-free ohmic contacts
- Patent Title (中): 无金属欧姆接触
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Application No.: US13152481Application Date: 2011-06-03
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Publication No.: US08466555B2Publication Date: 2013-06-18
- Inventor: Ram V. Chelakara , Thomas E. Kazior , Jeffrey R. LaRoche
- Applicant: Ram V. Chelakara , Thomas E. Kazior , Jeffrey R. LaRoche
- Applicant Address: US MA Waltham
- Assignee: Raytheon Company
- Current Assignee: Raytheon Company
- Current Assignee Address: US MA Waltham
- Agency: Daly, Crowley, Mofford & Durkee, LLP
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A semiconductor structure is provided having: a semiconductor; a gold-free electrically conductive structure in ohmic contact with the semiconductor; and a pair of electrically conductive layers separated by a layer of silicon. The structure includes: a refractory metal layer disposed in contact with the semiconductor; and wherein one of the pair of electrically conductive layers separated by the layer of silicon is the refractory metal layer. A second layer of silicon is disposed on a second one of the pair of pair of electrically conductive layers and including a third electrically conducive layer on the second layer of silicon. In one embodiment, the semiconductor includes a III-V material.
Public/Granted literature
- US20120305931A1 GOLD-FREE OHMIC CONTACTS Public/Granted day:2012-12-06
Information query
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