Invention Grant
US08471232B2 Resistive memory devices including vertical transistor arrays and related fabrication methods 有权
包括垂直晶体管阵列和相关制造方法的电阻式存储器件

Resistive memory devices including vertical transistor arrays and related fabrication methods
Abstract:
A resistive memory device includes a vertical transistor and a variable resistance layer. The vertical transistor includes a gate electrode on a surface of a substrate, a gate insulation layer extending along a sidewall of the gate electrode, and a single crystalline silicon layer on the surface of the substrate adjacent to the gate insulation layer. At least a portion of the single crystalline silicon layer defines a channel region that extends in a direction substantially perpendicular to the surface of the substrate. The variable resistance layer is provided on the single crystalline silicon layer. The variable resistance layer is electrically insulated from the gate electrode. Related devices and fabrication methods are also discussed.
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