Invention Grant
- Patent Title: Striping methodology for maskless lithography
- Patent Title (中): 无掩模光刻的剥离方法
-
Application No.: US13225617Application Date: 2011-09-06
-
Publication No.: US08473877B2Publication Date: 2013-06-25
- Inventor: Hung-Chun Wang , Tzu-Chin Lin , Nian-Fuh Cheng , Jeng-Horng Chen , Wen-Chun Huang , Ru-Gun Liu
- Applicant: Hung-Chun Wang , Tzu-Chin Lin , Nian-Fuh Cheng , Jeng-Horng Chen , Wen-Chun Huang , Ru-Gun Liu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.,Haynes and Boone, LLP
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.,Haynes and Boone, LLP
- Agency: Haynes and Boone, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
The present disclosure involves a method of performing a maskless lithography process. The method includes receiving a computer layout file for an integrated circuit (IC) device. The layout file contains a plurality of IC sections. The method includes separating the computer layout file into a plurality of sub-files. The method includes striping the plurality of sub-files concurrently using a plurality of computer processors, thereby generating a plurality of striped sub-files. The method includes transferring the plurality of striped sub-files to a maskless lithography system.
Public/Granted literature
- US20130061187A1 STRIPING METHODOLOGY FOR MASKLESS LITHOGRAPHY Public/Granted day:2013-03-07
Information query