Invention Grant
- Patent Title: Method and apparatus for electroplating
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Application No.: US12606030Application Date: 2009-10-26
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Publication No.: US08475644B2Publication Date: 2013-07-02
- Inventor: Steven Mayer , Jingbin Feng , Zhian He , Jonathan Reid , Seshasayee Varadarajan
- Applicant: Steven Mayer , Jingbin Feng , Zhian He , Jonathan Reid , Seshasayee Varadarajan
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D21/12
- IPC: C25D21/12 ; C25D7/12 ; C25D3/38

Abstract:
An apparatus for electroplating a layer of metal onto the surface of a wafer includes an ionically resistive ionically permeable element located in close proximity of the wafer and an auxiliary cathode located between the anode and the ionically resistive ionically permeable element. The ionically resistive ionically permeable element serves to modulate ionic current at the wafer surface. The auxiliary cathode is configured to shape the current distribution from the anode. The provided configuration effectively redistributes ionic current in the plating system allowing plating of uniform metal layers and mitigating the terminal effect.
Public/Granted literature
- US20100044236A1 METHOD AND APPARATUS FOR ELECTROPLATING Public/Granted day:2010-02-25
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