Invention Grant
US08476688B2 Semiconductor device and method for manufacturing the same,which prevents leaning of a storage node when forming a capacitor having a plurality of storage nodes of “L” or “+” shape support patterns
失效
半导体装置及其制造方法,当形成具有多个“L”或“+”形状的支撑图案的存储节点的电容器时,防止存储节点倾斜
- Patent Title: Semiconductor device and method for manufacturing the same,which prevents leaning of a storage node when forming a capacitor having a plurality of storage nodes of “L” or “+” shape support patterns
- Patent Title (中): 半导体装置及其制造方法,当形成具有多个“L”或“+”形状的支撑图案的存储节点的电容器时,防止存储节点倾斜
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Application No.: US12244115Application Date: 2008-10-02
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Publication No.: US08476688B2Publication Date: 2013-07-02
- Inventor: Ho Jin Cho , Cheol Hwan Park , Jae Wook Seo , Jong Kuk Kim
- Applicant: Ho Jin Cho , Cheol Hwan Park , Jae Wook Seo , Jong Kuk Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Ladas & Parry LLP
- Priority: KR10-2008-0015520 20080220
- Main IPC: H01L31/113
- IPC: H01L31/113

Abstract:
A semiconductor device that prevents the leaning of storage node when forming a capacitor having high capacitance includes a plurality of cylinder-shaped storage nodes formed over a semiconductor substrate; and support patterns formed to fix the storage nodes in the form of an ‘L’ or a ‘+’ when viewed from the top. This semiconductor device having support patterns in the form of an ‘L’ or a ‘+’ reduces stress on the storage nodes when subsequently forming a dielectric layer and plate nodes that prevents the capacitors from leaking.
Public/Granted literature
- US20090206448A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2009-08-20
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