发明授权
US08476776B2 Semiconductor module, method for fabricating the semiconductor module, and mobile apparatus
有权
半导体模块,半导体模块的制造方法以及移动装置
- 专利标题: Semiconductor module, method for fabricating the semiconductor module, and mobile apparatus
- 专利标题(中): 半导体模块,半导体模块的制造方法以及移动装置
-
申请号: US12935854申请日: 2009-03-18
-
公开(公告)号: US08476776B2公开(公告)日: 2013-07-02
- 发明人: Ryosuke Usui , Yasunori Inoue , Mayumi Nakasato , Katsumi Ito
- 申请人: Ryosuke Usui , Yasunori Inoue , Mayumi Nakasato , Katsumi Ito
- 申请人地址: JP Osaka
- 专利权人: Sanyo Electric Co., Ltd.
- 当前专利权人: Sanyo Electric Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2008-091644 20080331
- 国际申请: PCT/JP2009/055307 WO 20090318
- 国际公布: WO2009/122911 WO 20091008
- 主分类号: H01L23/28
- IPC分类号: H01L23/28 ; H01L23/29
摘要:
A semiconductor module manufacturing method includes a step of bonding a semiconductor wafer, which has a plurality of semiconductor elements each of which has an element electrode formed thereon, on an expansible first insulating resin layer; a step of dicing the semiconductor wafer; a step of expanding the first insulating resin layer to widen a gap between semiconductor elements; a pressure-bonding step of pressure-bonding a metal plate whereupon an electrode is arranged and the semiconductor elements with the widened gaps in between, by having a second insulating resin layer in between, and electrically connecting the electrode and the element electrodes; a step of forming a wiring layer which corresponds to each semiconductor element by selectively removing the metal plate and forming a plurality of semiconductor modules connected by the first insulating resin layer and the second insulating resin layer; and a step of separating the semiconductor modules by cutting the first insulating resin layer and the second insulating resin layer.
公开/授权文献
信息查询
IPC分类: