Invention Grant
US08477288B2 Digital exposure method and digital exposure device for performing the method 有权
用于执行该方法的数字曝光方法和数字曝光装置

Digital exposure method and digital exposure device for performing the method
Abstract:
A digital exposure method and a digital exposure device for performing the method are disclosed. In the method, a graphic data system file is produced in correspondence with each of a plurality of patterns formed on a substrate. Then, a digital micromirror device on/off data is generated from the graphic data system file. Then, the substrate is exposed in response to the digital micromirror device on/off data. Thus, at least a first exposure for forming a first pattern of a display panel, and a second exposure for forming identification numbers of a substrate and each display panel and removing an edge portion of the substrate may be simultaneously performed, to simplify the exposure process decrease costs.
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