发明授权
US08481969B2 Effective algorithm for warming a twist axis for cold ion implantations
有权
用于加热冷离子注入扭转轴的有效算法
- 专利标题: Effective algorithm for warming a twist axis for cold ion implantations
- 专利标题(中): 用于加热冷离子注入扭转轴的有效算法
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申请号: US13150822申请日: 2011-06-01
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公开(公告)号: US08481969B2公开(公告)日: 2013-07-09
- 发明人: Kan Ota , William Davis Lee
- 申请人: Kan Ota , William Davis Lee
- 申请人地址: US MA Beverly
- 专利权人: Axcelis Technologies, Inc.
- 当前专利权人: Axcelis Technologies, Inc.
- 当前专利权人地址: US MA Beverly
- 代理机构: Eschweiler & Associates, LLC
- 主分类号: H01J37/18
- IPC分类号: H01J37/18 ; G21K5/00
摘要:
A method for warming a rotational interface in an ion implantation environment provides a scan arm configured to rotate about a first axis and an end effector coupled to the scan arm via a motor to selectively secure a workpiece. The end effector is configured to rotate about a second axis having a bearing and a seal associated with the second axis and motor. The motor is activated, and the rotation of motor is reversed after a predetermined time or when the motor faults due to a rotation the end effector about the second axis. A determination is made as to whether the rotation of the end effector about the second axis is acceptable, and the scan arm is reciprocated about the first axis when the rotation of the end effector is unacceptable, wherein inertia of the end effector causes a rotation of the end effector about the second axis.