发明授权
US08481989B2 Semiconductor resistive random access memory device suitable for bipolar action
有权
半导体电阻随机存取存储器件适用于双极作用
- 专利标题: Semiconductor resistive random access memory device suitable for bipolar action
- 专利标题(中): 半导体电阻随机存取存储器件适用于双极作用
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申请号: US13094278申请日: 2011-04-26
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公开(公告)号: US08481989B2公开(公告)日: 2013-07-09
- 发明人: Wakana Kai , Hirokazu Ishida
- 申请人: Wakana Kai , Hirokazu Ishida
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2010-120875 20100526
- 主分类号: H01L29/02
- IPC分类号: H01L29/02
摘要:
According to one embodiment, a semiconductor memory device includes a word line interconnect layer, a bit line interconnect layer and a pillar. The word line interconnect layer includes a plurality of word lines extending in a first direction. The bit line interconnect layer includes a plurality of bit lines extending in a second direction intersecting with the first direction. The pillar is disposed between each of the word lines and each of the bit lines. The pillar has a selector stacked film containing silicon, and a variable resistance film disposed on a side of the word lines or the bit lines. The selector stacked film has a different component-containing layer. The different component-containing layer is formed at one position in a region excluding ends on the sides of the word and bit lines, and contains a 14 group element having a larger atomic radius than an atomic radius of silicon.
公开/授权文献
- US20110291063A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2011-12-01
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