Invention Grant
US08492189B2 Combinatorial screening of transparent conductive oxide materials for solar applications
失效
用于太阳能应用的透明导电氧化物材料的组合筛选
- Patent Title: Combinatorial screening of transparent conductive oxide materials for solar applications
- Patent Title (中): 用于太阳能应用的透明导电氧化物材料的组合筛选
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Application No.: US13460333Application Date: 2012-04-30
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Publication No.: US08492189B2Publication Date: 2013-07-23
- Inventor: Zhi-Wen Sun , Nitin Kumar , Guizhen Zhang , Nikhil Kalyankar , Minh Anh Nguyen
- Applicant: Zhi-Wen Sun , Nitin Kumar , Guizhen Zhang , Nikhil Kalyankar , Minh Anh Nguyen
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
Embodiments of the current invention include methods of improving a process of forming a textured TCO film by combinatorial methods. The combinatorial method may include depositing a TCO by physical vapor deposition or sputtering, annealing the TCO, and etching the TCO where at least one of the depositing, the annealing, or the etching is performed combinatorially. Embodiments of the current invention also include improved methods of forming the TCO based on the results of combinatorial testing.
Public/Granted literature
- US20120238050A1 Combinatorial Screening of Transparent Conductive Oxide Materials for Solar Applications Public/Granted day:2012-09-20
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