发明授权
- 专利标题: Transistor, semiconductor device comprising the transistor and method for manufacturing the same
- 专利标题(中): 晶体管,包括晶体管的半导体器件及其制造方法
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申请号: US13144906申请日: 2011-02-25
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公开(公告)号: US08492210B2公开(公告)日: 2013-07-23
- 发明人: Qingqing Liang , Huilong Zhu , Huicai Zhong
- 申请人: Qingqing Liang , Huilong Zhu , Huicai Zhong
- 申请人地址: CN Beijing
- 专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人地址: CN Beijing
- 代理机构: Martine Penilla Group, LLP
- 优先权: CN201010610932 20101217
- 国际申请: PCT/CN2011/000305 WO 20110225
- 国际公布: WO2012/079272 WO 20120621
- 主分类号: H01L21/84
- IPC分类号: H01L21/84
摘要:
The invention relates to a transistor, a semiconductor device comprising the transistor and manufacturing methods for the transistor and the semiconductor device. The transistor according to the invention comprises: a substrate comprising at least a base layer, a first semiconductor layer, an insulating layer and a second semiconductor layer stacked sequentially; a gate stack formed on the second semiconductor layer; a source region and a drain region located on both sides of the gate stack respectively; a back gate comprising a back gate dielectric and a back gate electrode formed by the insulating layer and the first semiconductor layer, respectively; and a back gate contact formed on a portion of the back gate electrode. The back gate contact comprises an epitaxial part raised from the surface of the back gate electrode, and each of the source region and the drain region comprises an epitaxial part raised from the surface of the second semiconductor layer. As compared to a conventional transistor, the manufacturing process of the transistor of the invention is simplified and the cost of manufacture is reduced.
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