Invention Grant
US08492216B2 Semiconductor structure with contact structure and manufacturing method of the same
有权
具有接触结构的半导体结构及其制造方法相同
- Patent Title: Semiconductor structure with contact structure and manufacturing method of the same
- Patent Title (中): 具有接触结构的半导体结构及其制造方法相同
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Application No.: US13014048Application Date: 2011-01-26
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Publication No.: US08492216B2Publication Date: 2013-07-23
- Inventor: Shih-Hung Chen
- Applicant: Shih-Hung Chen
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Priority: TW99137030A 20101028
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
The invention relates to a semiconductor structure and a manufacturing method of the same. The semiconductor structure includes a semiconductor substrate, an isolation layer, a first metal layer, and a second metal layer. The semiconductor substrate includes an upper substrate surface and a semiconductor device below the upper substrate surface. The isolation layer has opposite a first side wall and a second side wall. The first metal layer is disposed on the upper substrate surface. The first metal layer and the second metal layer are disposed on the first side wall and the second side wall, respectively. A lower surface of the second metal layer is below the upper substrate surface.
Public/Granted literature
- US20120104542A1 Semiconductor Structure With Contact Structure and Manufacturing Method of the Same Public/Granted day:2012-05-03
Information query
IPC分类: