Invention Grant
US08493087B2 Probe card, and apparatus and method for testing semiconductor device using the probe card
有权
探针卡,以及使用探针卡测试半导体器件的装置和方法
- Patent Title: Probe card, and apparatus and method for testing semiconductor device using the probe card
- Patent Title (中): 探针卡,以及使用探针卡测试半导体器件的装置和方法
-
Application No.: US12654235Application Date: 2009-12-15
-
Publication No.: US08493087B2Publication Date: 2013-07-23
- Inventor: Chang-Hyun Cho , Joonyeon Kim , Sang-Gu Kang , Sanghoon Lee
- Applicant: Chang-Hyun Cho , Joonyeon Kim , Sang-Gu Kang , Sanghoon Lee
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2008-0127950 20081216
- Main IPC: G01R31/00
- IPC: G01R31/00

Abstract:
A probe card transmitting electrical test signals between a tester and a semiconductor device includes a main circuit board configured to receive and transmit electrical signals from the tester, an interface unit electrically connected to the main circuit board, the interface unit including a signal line and a signal connection terminal, and at least one probe unit connected to the interface unit, the probe unit being detachable and including a plurality of probe needles arranged in a pattern corresponding to a pattern of electrode pads of the semiconductor device.
Public/Granted literature
- US20100148811A1 Probe card, and apparatus and method for testing semiconductor device using the probe card Public/Granted day:2010-06-17
Information query